Journal Press India^®

Author Details ( * ) denotes Corresponding author

The paper represents the modeling of nano scale gold film thickness deposited by thermal evaporation process. Gold is evaporated from a resistively heated boat at a temperature of 1900 K onto a surface held on a fixed surface. The incident molecular flux onto the silicon surface is 7.86x1019 (1/m2sec). The thickness varies between 78 nm and 80 nm across the sample after 60 s of deposition, with radial symmetry about the midpoint of the source. The film thickness, mass deposited on the substrate and mass transfer rate on silicon substrates with time dependent model using BDF solver is calculated. The SEM micrographs shows the smooth and uniformly distributed nano scale gold film on silicon and the average grain size of gold is 15-30 nm. The XRD analysis shows the polycrystalline face centered cubic (fcc) structure in preferential (111) plane. Deposited gold film thickness measured from Dektek surface profiler at different points on the substrate surface

Keywords

Physical Vapor Deposition; Modeling; Film Thickness Simulation; Thin Film Deposition; Vacuum

1. Ali Moarrefzadeh et.al., Simulation and Modeling of Physical Vapor Deposition (PVD) Process, Wseas Transactions on Applied and Theoretical Mechanics, 7(2), 2012


2. P. S. Raghupathi, Joseph George, C. S. Menon, The Effect of Deposition Rate on Electrical, Optical and Structural Properties of ITO Thin Films, E-Journal of Chemistry, 2(3), 2005, 171-177


3. Haichuan Mu, Hui Shen, David Klotzkin, Dependence of film morphology on deposition rate in ITO/TPD/Alq3/Al organic luminescence diode, Journal of Solid-State Electronics, 48, 2004, 2085–2088


4. Adeleh Granmayeh Rada, Hamed Abbasib,Mohammad Hossein Afzalib, Gold Nanoparticles: Synthesising, Characterizing and Reviewing Novel Application in Recent Years Physics Procedia, 22, 2011, 203 – 208


5. Ragini Raj Singh, et.al, Investigation of passivation processes for HgCdTe/CdS structure for infrared application, 10, 2006, 235–240


6. Wenjun Zhou et al. , Effective Permittivity of Ultrathin Chemical Vapor Deposited Gold Films on Optical Fibers at Infrared Wavelengths, J. Phys. Chem. C, 118, 2014, 670−678


7. Keewah Chan et al., Formation of gold nanoparticles in silicon suboxide films prepared by plasma enhanced chemical vapour deposition, journal of thin solid films, 519, 2011, 4952-4957


8. Carl E. Larson et al.,Chemical Vapor deposition of Gold, IBM Almaden Research Center, San Jose, California 95120, 1986


9. Miroslav Gojo et al., Electrochemical Deposition of Gold in Citrate Solution Containing Thallium Polja~eka, Acta Chim. Slov. 2008, 55, 330–337


10. Anne-Felicie Lamic-Humblot, et.al, An easy way to obtain thin film on silica glass substrate by chemical method, 539, 2013, 151–153


11. T. Donnelly, S. Krishinamurthy, K. Carney, N. McEvovy, J. G. Lunney, Pulsed laser deposition of Nanoparticles of film Au, Journal of Applied Surface Science, 254, 2007, 1303–1306


12. X. Zhang, X. Zhang, S. S. Chu, J. R. Ho, C. P. Grigoropoulos, Excimer laser blation of thin gold fims on a quartz crystal microbalance at various agron background pressures, Journal of applied physics A, 64, 1997, 545-552


13. Anna Schaub, Petr Slepicka, Irena Kasparkova, Petr Malinsky, Gold Nanolayer and Nanocluster coatings induced by heat treatment and evaporation technique, Springer Open Journal, Nanoscale Research letters 2013, 8, 249


14. Behrang Moazzez, Stacey M. O’Brien and Erika F. Merschrod S., Improved Adhesion of Gold Thin Films Evaporated on Polymer Resin: Applications for Sensing Surfaces and MEMS, Journal of Sensors, 13, 2013, 7021-7032


15. Maxime Gougis, Antonio Pereira, Dongling Ma1 and Mohamed Mohamedi, Oxygen Gas Assisted Laser Deposition of Gold Thin Films: Electrooxidation of Glucose, International Journal of Electrochemical Science, 9, 2014, 3588-3601


16. C. Celed´on, M. Flores, P. H¨aberle , J. E. Vald´es, Surface Roughness of Thin Gold Films and its Effects on the Proton Energy Loss Straggling, Brazilian Journal of Physics, 36(3B), 2006, 956-959


17. Hartmann Hieber, Karin Pape, Ageing of Thin Gold Films, Gold Bull., 1982, 15, (3)


18. Adam Proszkynski, Dariusz Chocyk, Grzegorz Gladyszewski, Stress modification in gold metal thin films during thermal annealing, Optica Applicata, XXXIX(4), 2009, 705-710


19. Authur K.Burak Ucer, Vacuum evaporation, www.users.wfu.edu